E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1102 - Superseded which may be integrated circuit

which may be integrated circuit (IC) wafers and devices

This Standard includes the description of the physical connector

orgで入手可能となる。初版は1990年発行。前版は2002年11月発行。

When this is done

SEMI D61-1110 (first published)

E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1102 - Superseded which may be integrated circuitNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical