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Originally published in 1995
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SEMI D9 —Terminology for FPD Substrates
This Test Method will determine whether or not the quantity of moisture delivered by a gaseous moisture standard is in agreement with that predicted for the standard on the basis of physical principles
using the measured dimensions
C06100 - SEMI C61 - Specification for Bar-Code Container Identification StdPbc-0912 Originally published in 1995NOTICE: This Document was balloted and approved for withdrawal in 2010. To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI Specification. This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification. Referenced SEMI Standards (purchase separately) SEMI C1
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