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11-0301 (first published)
SEMI E39-0703 (technical revision)
その領域は；
3 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)
SEMI E39 — Specification for Object Services Standard: Concepts
E12500 - SEMI E125 - Specification for Equipment Self Description (EqSD) StdPbc-0520 11-0301 (first published)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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