M05300 - SEMI M53 - パターンのない半導体ウェーハ表面上に証明済み手法で付着した単分散標準粒子を用いた走査型表面検査システム較正の作業方法 StdPbc-0626 This method provides a uniform

This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings

orgで入手可能になり，2001年3月発行に至る。初版は，1997年6月発行。

using a short baseline drawn between 1040 cm1 and 1160 cm1 to reduce the uncertainties due to perturbations in the IR absorption at the end-point regions of longer baselines that arise from effects other than absorption by interstitial oxygen

dry Si wafers that are supported by a mechanism that move the test specimen through the measurement equipment

来源于较低质量等级助熔剂的杂质元素或碳会影响分析数据的准确性，建议使用高纯度助熔剂。

M05300 - SEMI M53 - パターンのない半導体ウェーハ表面上に証明済み手法で付着した単分散標準粒子を用いた走査型表面検査システム較正の作業方法 StdPbc-0626 This method provides a uniformNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee2010120global Audits and Reviews Subcommittee20102www. semi. org20033200911 PSLSSISSSIS SSISLLS (LSE) SEMI M59LSE SSISSSIS ( 8. 1 SSIS ( 8. 2 SEMI M1 (LLS) SSISLLSSSIS LSEPSLLLS ( 3. 1 SEMI M52