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shelf life is viewed from a quality point of view
originally published November 2003
This Document covers requirements for hexafluoroethane used in the semiconductor industry
This Standard also provides a guide for grade of 4
SEMI 3D16-0822 (technical revision)
A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-0918 - Superseded shelf life is viewed from* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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