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In this Document
This Standard provides guidance for construction
SEMI M45 — Provisional Specification for 300 mm Shipping System
Since a 3D stacking process may include wafers from multiple fabrication facilities
It is well known that oxygen precipitates are also a source of gate oxide defects
G08500 - SEMI G85 - マップデータ・フォーマット用仕様 Revision:SEMI G85-1101 - Superseded In this DocumentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Automated Test Equipment CommitteeNorth American Automated Test Equipment Committee20033122003411North American Regional Standards Committee20035www. semi. org2003720011120033 Referenced SEMI Standards SEMI G81 Specification
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