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This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers
2 This Safety Guideline may also be used for the design of safety signs for the facilities where semiconductor manufacturing equipment is installed
Boron and phosphorus are common dopants in solar Si wafers
a criterion for determining conformance with this Document
2 Values obtained using this method
F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン Revision:SEMI F5-1101 - Inactive This Standard specifies the toolNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Environmental Health and Safety CommitteeNorth American Environmental Health & Safety Committee2001827North American Regional Standards Committee20019www. semi. org2001111990 NOTICE: This Standard or Safety Guideline has an