E12300 - SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM) StdPbc-0219 This Test Method is applied

This Test Method is applied for

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier

the Sensor/Actuator Network CDM

If present

本スタンダードは，global Flat Panel Display – Factory Automation Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年6月にwww

E12300 - SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM) StdPbc-0219 This Test Method is appliedThis Standard establishes a Specific Equipment Model (SEM) for Handling equipment (HSEM). The SEM consists of equipment characteristics and behaviors that are applicable to this class of equipment. The intent of this Standard is to facilitate the integration of Handling equipment into an automated (semiconductor) factory. This Standard accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation