MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal StdVol-3D-IC A concept of a ‘fixed

A concept of a ‘fixed quality area’ is used

FPDガラス基板は，下記の4項目に限定される。 アレイ基板に用いられるガラス基板のうち，まだ，成膜が施されていないベアーガラス基板

which are technology specific

コンピュータおよび通信システム

This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management

MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal StdVol-3D-IC A concept of a ‘fixedThe orientation of semiconductor crystals and wafers as determined by these test methods is an important materials acceptance requirement because the orientation controls various parameters of semiconductor devices fabricated from the material. This Test Method covers techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low index atomic plane in single crystals used primarily for semiconductor